Polymer micro-heat-pipe for InP/InGaAs technologies

IEEE International Symposium on Electron Devices for Microwave and Optoelectronic Applications

Volumn 2002-January, Issue , 2002, Pages 143-148

  Liu, Wai Y ^a   Mohammadi, Saeed ^a   Katehi, Linda P B ^a   Khalkhali, Hamed ^a   Kurabayashi, Katsuo ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Conductivity measurement; Cooling; Indium gallium arsenide; Indium phosphide; Polymers; Technology management; Temperature; Thermal conductivity; Thermal management; Wafer bonding

Indexed keywords

CAPILLARY FLOW; COOLING; ELECTRON DEVICES; GALLIUM ARSENIDE; GALLIUM PHOSPHIDE; HEAT PIPES; INDIUM; INDIUM PHOSPHIDE; POLYMERS; TEMPERATURE; TEMPERATURE CONTROL; THERMAL VARIABLES CONTROL; WAFER BONDING;

CONDUCTIVITY MEASUREMENTS; EFFECTIVE THERMAL CONDUCTIVITY; HIGH TEMPERATURE; INDIUM GALLIUM ARSENIDE; MICRO HEAT PIPE; TECHNOLOGY MANAGEMENTS; THERMAL MANAGEMENT PROBLEMS; WAFER TO WAFER BONDING;

THERMAL CONDUCTIVITY;

EID: 1942538096     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EDMO.2002.1174945     Document Type: Conference Paper

References (4)

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