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Volumn 3, Issue , 2003, Pages 855-860

Thermal property measurement of thin aluminum oxide layers for giant magnetoresistive (GMR) head applications

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ELECTRIC BREAKDOWN OF SOLIDS; ELECTROSTATICS; FAILURE ANALYSIS; GIANT MAGNETORESISTANCE; MAGNETIC DISK STORAGE; MAGNETIC RECORDING; PARAMETER ESTIMATION; PASSIVATION; THERMAL CONDUCTIVITY OF SOLIDS; TRANSDUCERS;

EID: 1942536081     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2003-41626     Document Type: Conference Paper
Times cited : (6)

References (16)
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    • Chang, C.1
  • 3
    • 0001022191 scopus 로고    scopus 로고
    • Process Considerations for Critical Features in High Areal Density Thin Film Magnetoresistive Heads: A review
    • Fontana, R.E., Jr., MacDonald, S.A., Santini, H.A.A. and Tsang, C., 1999, "Process Considerations for Critical Features in High Areal Density Thin Film Magnetoresistive Heads: A review," IEEE Transactions on Magnetics, Vol. 35, No. 2, pt. 1, pp. 806-11.
    • (1999) IEEE Transactions on Magnetics , vol.35 , Issue.2 PART 1 , pp. 806-811
    • Fontana Jr., R.E.1    MacDonald, S.A.2    Santini, H.A.A.3    Tsang, C.4
  • 8
    • 0033534934 scopus 로고    scopus 로고
    • Thermal characterization of anisotropic thin dielectric films using harmonic Joule heating
    • Ju, Y.S., Kurabayashi, K. and Goodson, K.E., 1999, "Thermal characterization of anisotropic thin dielectric films using harmonic Joule heating," Thin Solid Films (Elsevier) 339, pp.160-164.
    • (1999) Thin Solid Films (Elsevier) , vol.339 , pp. 160-164
    • Ju, Y.S.1    Kurabayashi, K.2    Goodson, K.E.3
  • 10
    • 0033731071 scopus 로고    scopus 로고
    • Effect of the Pressure of Sputtering Atmosphere on the Physical Properties of Amorphous Aluminum Oxide Films
    • Kijima, Y. and Hanada, T., 2000, "Effect of the Pressure of Sputtering Atmosphere on the Physical Properties of Amorphous Aluminum Oxide Films," Journal of Material Science 35, pp. 2193-2199.
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    • Kijima, Y.1    Hanada, T.2
  • 11
    • 84885282586 scopus 로고    scopus 로고
    • 23 Aug.
    • MEMS Clearing House, 23 Aug. 2002, www.memsnet.org
    • (2002) MEMS Clearing House
  • 12
    • 0019183273 scopus 로고
    • Origins and Minimization of Defects in Sputtered Thin Films
    • Nowicki, R.S., 1980, "Origins and Minimization of Defects in Sputtered Thin Films," Solid State Technology, pp. 83-88.
    • (1980) Solid State Technology , pp. 83-88
    • Nowicki, R.S.1
  • 13
    • 84975354333 scopus 로고
    • RF Sputtered Aluminum Oxide Films on Silicon
    • Salama, C. A., 1970, "RF Sputtered Aluminum Oxide Films on Silicon," Journal of Electrochemical Society, pp. 913-917
    • (1970) Journal of Electrochemical Society , pp. 913-917
    • Salama, C.A.1
  • 14
    • 0029478201 scopus 로고
    • ESD Failure Mechanisms of Inductive and Magentoresistive Recoding Heads
    • Wallash, A., Hughbanks, T. and S. Voldman, 1995, "ESD Failure Mechanisms of Inductive and Magentoresistive Recoding Heads," EOS/ESD Symposium, pp.322-330.
    • (1995) EOS/ESD Symposium , pp. 322-330
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  • 15
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    • Numerical Study of Temperature Rise in Giant Magnetoresistive (GMR) Sensor during an Electrostatic Discharge (ESD) Event
    • Submitted to the, Las Vegas, Nevada, USA July 21-23, 2003
    • Yang, Y., Sadeghipour, S. M., and Asheghi, M., 2003, "Numerical Study of Temperature Rise in Giant Magnetoresistive (GMR) Sensor During an Electrostatic Discharge (ESD) Event," Submitted to the National Heat Transfer Conference, Las Vegas, Nevada, USA July 21-23, 2003.
    • (2003) National Heat Transfer Conference
    • Yang, Y.1    Sadeghipour, S.M.2    Asheghi, M.3
  • 16
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    • Finite element analysis of planar stress anisotropy and thermal behavior in thin films
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.