Rapid prototyping of micro-electrodes on glass and polymers by laser-assisted corrosion of aluminum films in water

Microelectronic Engineering

Volumn 67-68, Issue , 2003, Pages 473-478

  Haefliger, D ^a   Cahill, B P ^a   Stemmer, A ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

Corrosion; Laser processing; Microfluidics; Rapid prototyping; Sensors

Indexed keywords

ALUMINUM; CORROSION; GLASS; LITHOGRAPHY; METALLIC FILMS; MICROELECTRODES; POLYMERS; SENSORS;

ALUMINUM FILMS;

LASER BEAM EFFECTS;

EID: 18844467101     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(03)00103-5     Document Type: Conference Paper

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