Measuring the optical and electromechanical properties of MEMS mirrors

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 2, Issue , 2003, Pages 1466-1469

  Reznichenko, Y ^a   Judy, M ^a   Zhang, Sam ^a  

^a ANALOG DEVICES INC   (United States)

Author keywords

Insertion loss; Loss measurement; Micromechanical devices; Mirrors; Nonlinear control systems; Nonlinear optics; Optical feedback; Optical sensors; Stability; Voltage

Indexed keywords

ACTUATORS; ANGLE MEASUREMENT; CONVERGENCE OF NUMERICAL METHODS; ELECTRIC POTENTIAL; FEEDBACK; INSERTION LOSSES; MICROSYSTEMS; MIRRORS; NONLINEAR CONTROL SYSTEMS; NONLINEAR FEEDBACK; OPTICAL FEEDBACK; OPTICAL SENSORS; SOLID-STATE SENSORS; SYSTEM STABILITY; TRANSDUCERS;

ANGULAR POSITIONING; ELECTROMECHANICAL CHARACTERISTICS; ELECTROMECHANICAL PROPERTY; LONG TERM STABILITY; LOSS MEASUREMENT; MICROMECHANICAL DEVICE; NON-LINEAR CONTROLLERS; POLARIZATION DEPENDENT LOSS;

NONLINEAR OPTICS;

EID: 18844391406     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1217053     Document Type: Conference Paper

References (5)

1. T. Juneau, et al., "Dual-axis Optical Mirror Positioning Using a Nonlinear Closed-loop Controller," Transducers Dig. of Tech. Papers, Boston, MA, June 2003.
2. th European Conference on Optical Communication, Copenhagen, Sep. 8-12, 2002.
3. T. Brosnihan, et al., "Optical iMEMS™ - A Fabrication Process for MEMS Optical Switches with Integrated On-Chip Electronics," Transducers Dig. of Tech. Papers, Boston, MA, June 2003.
4. Position sensing detectors theory manual from On-Trak Photonics, Inc. Web page: http://www.on-trak.com/theory.html.
5. X. Wang, M. W. Judy and J. White, "Validating Fast Simulation of Air Damping in Micromachined Devices," MEMS 2002, Las Vegas, Jan. 20-24, pp. 210-213.