Ablation of PMMA, PTFE, and Si by soft x-rays emitted from hot dense plasma

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4760, Issue II, 2002, Pages 1098-1105

  Juha, Libor ^a   Krása, Josef ^a   Präg, Ansgar R ^a   Cejnarová, Andrea ^a   Chvostová, Dagmar ^a   Kravárik, Jozef ^b   Kubeš, Pavel ^b   Bakshaev, Yuri L ^c   Chernenko, Andrei S ^c   Korolev, Valeri D ^c   Tumanov, Viktor I ^c   Ivanov, Mikhail I ^d   Scholz, Marek ^e   Ryć, Leszek ^e   Tomaszewski, Krzysztof ^e   Viskup, Richard ^f   Boody, Frederick P ^g   Kodymová, Jarmila ^a  

^a INSTITUTE OF PHYSICS   (Czech Republic)

^b CZECH TECHNICAL UNIVERSITY IN PRAGUE   (Czech Republic)

^c KURCHATOV INSTITUTE   (Russian Federation)

^d Clnstitute of Pulsed Systems   (Russian Federation)

^e Institute of PPLM   (Poland)

^f Physics and Informatics   (Slovakia)

^g Ion Light Technologies GmbH   (Germany)

Author keywords

Ablation; Laser produced plasma; Plasma focus; Polymers; Silicon; Soft x rays; Z pinch

Indexed keywords

LASER PRODUCED PLASMAS; MICROMACHINING; POLYMETHYL METHACRYLATES; POLYTETRAFLUOROETHYLENES; SILICON; X RAYS;

SOFT X-RAY EMISSION;

LASER ABLATION;

EID: 18744403335     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.482076     Document Type: Conference Paper

References (16)

1. L. Juha, "Materials ablation with soft x-rays," Čs. čas. fyz. 50, pp. 110-118, 2000, and references cited therein.
2. L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu.L. Bakshaev, A.S. Chernenko, V.D. Korolev, V.I. Tumanov, M.I. Ivanov, A. Bernardinello, J. Ullschmied, and F.P. Boody, "Ablation of poly(methyl methacrylate) by a single pulse of soft x-rays emitted from Z-pinch and laser-produced plasmas," Surf. Rev. Lett. 9, in press, 2002, and references cited therein.
3. B. Yaakobi, H. Kim, J.M. Soures, H.W. Deckman, and J. Dunsmuir, "Submicron x-ray lithography using laser-produced plasma as a source," Appl. Phys. Lett. 43, pp. 686-688, 1983.
4. A.T. Anderson, M.T. Tobin, and P.F. Peterson, "X-ray response of National Ignition Facility first surface materials," Fusion Technol. 26, pp. 804-808, 1994.
5. H. Deno, S. Sugiyama, Y. Kakudate, M. Yoshida, and S. Fujiwara, "VUV ablation of polymers by emission from gas-puff Z-pinch plasmas," Appl. Surf Sci. 96-98, pp. 563-568, 1996.
6. T. Katoh and Y. Zhang, "Synchrotron radiation direct photo-etching of polymers and crystals for micromachining," J. Synchrotron Rad. 5, pp. 1153-1156, 1998, and references cited therein.
7. X. Zhang, C. Jacobsen, S. Lindaas., and S. Williams, "Exposure strategies for polymethylmethacrylate from in situ x-ray absorption," J. Vac. Sci. Technol. B13, pp. 1477-1483, 1995.
8. T. Ogawa, A. Yamagushi, T. Soga, H. Tachibana, M. Matsumoto, H. Oizumi, and E. Takeda, New dry surface-imaging process for x-ray lithography, Jpn. J. Appl. Phys. - Part 1 33A, pp. 1577-1582, 1994.
9. M. Inayoshi, M. Ito, M. Hori, T. Goto, and M. Hiramatsu, "Formation and micromachining of teflon (fluorocarbon polymer) film by a completely dry process using synchrotron radiation," J. Vac. Sci. Technol. B17, pp. 945-956, 1999.
10. T. Fujimura, Y. Kuroki, T. Hisakado, A. Ikeda, R. Hattori, Y. Hakiai, M. Hidaka, J.-Y. Choi, and S.S. Chang, "Film density dependence of polymethylmethacrylate ablation under synchrotron radiation irradiation," Jpn. J. Appl. Phys. Part 1 40A, pp. 916-917, 2001, and refernces cited therein.
11. Yu.L. Bakshaev, P.I. Blinov, A.S. Chernenko, S.A. Dan'ko, Yu.G. Kalinin, V.D. Korolev, V.I. Tumanov, A.Yu. Shashkov, A.V. Chesnokov, and M.I. Ivanov, "Diagnostic arrangement on S-300 facility," Rev. Sci. Instrum. 72, pp. 1210-1213, 2001.
12. M. Scholz, R. Miklaszewski, V.A. Gribkov, and F. Mezzetti, "PF-1000 device," Nukleonika 45, pp. 155-158, 2000.
13. K. Jungwirth, L. Juha, A. Cejnarova, B. Kralikova, J. Krasa, E. Krousky, P. Krupickova, L. Laska, K. Masek, T. Mocek, M. Pfeifer, A. Präg, O. Renner, K. Rohlena, B. Rus, J. Skala, P. Straka, and J. Ullschmied, "The Prague Asterix Laser System," Phys. Plasmas 8, pp. 2495-2501, 2001.
14. M. Ross and A. Charlesby,"The effects of pile radiation on polymethylmethacrylate ("Perspex")," Atomics 4, pp. 189-194, 1953.
15. O. Maida, N. Kohma, M. Ueno, A. Shibuya, T. Kanashima, M. Okuyama, and H. Ohashi, "Evaporation and expansion of polytetrafluoroethylene induced by irradiation of soft x-rays from Figure-8 undulator," Jpn. J. Appl. Phys. - Part 1 40A, pp. 2435-2439, 2001.
16. R.F. Haglund, Jr., "Microscopic and mesoscopic aspects of laser-induced desorption and ablation," Appl. Surf. Sci. 96-98, pp.1-13, 1996.