Ultra-wideband three dimensional transitions for on-wafer packages

Conference Proceedings- European Microwave Conference

Volumn 2, Issue , 2004, Pages 645-648

  Margomenos, Alexandros ^a   Katehi, Linda P B ^b  

^a EMAG Technologies Inc   (United States)

^b PURDUE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANTENNAS; BANDWIDTH; BROADBAND NETWORKS; ELECTRONICS PACKAGING; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SILICON WAFERS; TELECOMMUNICATION SYSTEMS; WEIBULL DISTRIBUTION;

MEAN-TIME-TO-FAILURE (MTTF); ON-WAFER PACKAGES; RADIO FREQUENCY (RF) SWITCHES;

ELECTRIC SWITCHES;

EID: 18744397631     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

1. A. Margomenos and L.P.B. Katehi, "High Frequency Parasitic Effects for On-Wafer Packaging of RF MEMS Switches," in 2003 IEEE MTT-S International Microwave Symposium Digest, Philadelphia, PA, June 2003, pp. 1875-1878.
2. A. Margomenos and L.P.B. Katehi, "Fabrication and Accelerated Hermeticity Testing of an On-Wafer Package for RF MEMS," IEEE Transactions on Microwave Theory and Techniques, vol. 52, no. 6, pp. 1626-1636, June 2004.
3. S. Peck, "Comprehensive Model for Humidity Testing Correlation," in 24th Annual Proceedings of the Reliability Physics Symposium, Anaheim, CA, 1986, pp. 44-50.
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6. A. Margomenos, Three Dimensional Integration and Packaging Using Silicon Micromachining, Ph.D. thesis, University of Michigan, Ann Arbor, MI, 2003.
7. K.J. Herrick and L.P.B. Katehi, "RF W-Band Wafer-to-Wafer Transition," IEEE Transactions on Microwave Theory and Techniques, vol. 49, no. 4, pp. 600-608, April 2001.
8. Ansoft Version 9.0, High-Frequency Structure Simulator, 2003.
9. Agilent Technologies, Palo Alto, CA, Agilent Technologies' Advanced Design System, ver. 1.3, 1999.
10. A. Margomenos and L.P.B. Katehi, "DC to 40 GHz On-Wafer Package for RF MEMS Switches," IEEE Topical Meeting on Electronic Performance of Electronic Packaging, Digest of Papers., pp. 91-94, October 2002.