Intense blue photoluminescence from Si-in-SiNx thin film with high-density nanoparticles

Nanotechnology

Volumn 16, Issue 6, 2005, Pages 940-943

  Liu, Cheng ^a   Li, Chaorong ^a   Ji, Ailing ^a   Ma, Libo ^a   Wang, Yongqian ^a   Cao, Zexian ^a  

^a INSTITUTE OF PHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; DENSITY (SPECIFIC GRAVITY); LOW TEMPERATURE OPERATIONS; NANOSTRUCTURED MATERIALS; PHOTOLUMINESCENCE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; QUANTUM EFFICIENCY; SILICON NITRIDE; TRANSMISSION ELECTRON MICROSCOPY;

COLD SUBSTRATES; NANOPARTICLES; PARTICLE SIZE; RAPID ANNEALING;

THIN FILMS;

EID: 18744367807     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/16/6/053     Document Type: Article

References (18)

1. Canham L T 1990 Appl. Phys. Lett. 57 1046
2. Wang Y Q, Kong G L, Chen W D, Diao H W, Chen C Y, Zhang S B and Liao X B 2002 Appl. Phys. Lett. 81 4174
3. Seo S Y, Cho K S and Shin J H 2004 Appl. Phys. Lett. 84 717
4. Wang Y Q, Wang Y G, Cao L and Cao Z X 2003 Appl. Phys. Lett. 83 3474
5. Wang Y Q, Chen W D, Liao X B and Cao Z X 2003 Nanotechnology 14 1235
6. Zhou J G, White C W, Budai J D, Withrow S P and Chen Y 1995 Mater. Res. Soc. Symp. Proc. 358 175
7. Molinari M, Rinnert H, Vergnat M and Weisbecker P 2003 Mater. Sci. Eng. B 101 186
8. Molinari M, Rinnert H and Vergnat M 2003 Physica E 16 445
9. Molinari M, Rinnert H and Vergnat M 2000 Appl. Phys. Lett. 77 3499
10. Kenyon A J, Trwoga P F, Pitt C W and Rehm G 1996 J. Appl. Phys. 79 9291
11. Fishcer T, Muschik T, Schwarz R, Kovalev D and Koch F 1995 Mater. Res. Soc. Symp. Proc. 358 851
12. Kärcher R, Ley L and Johnson R L 1984 Phys. Rev. B 30 1896
13. Cooke D W, Muenchasuen R E, Bennett B L, Jacobsohn L G and Nastasi M 2004 J. Appl. Phys. 96 197
14. Voos M, Uzan P, Delalande C, Bastard G and Halimaoui A 1992 Appl. Phys. Lett. 61 1213
15. Wolkin M V, Jorne J, Fauchet P M, Allan G and Delerue C 1999 Phys. Rev. Lett. 82 197
16. Pavesi L, Negro L D, Mazzoleni C, Franzò G and Priolo F 2000 Nature 408 440
17. Bisi O, Ossicini S and Pavesi L 2000 Surf. Sci. Rep. 38 1
18. Daldosso N et al 2003 Phys. Rev. B 68 085327