Investigation of metal contacts on ScN

Applied Surface Science

Volumn 175, Issue 176, 2001, Pages 512-516

  Ortiz Libreros, M I ^a   Perjeru, F ^a   Bai, X ^a   Kordesch, M E ^a  

^a OHIO UNIVERSITY   (United States)

Author keywords

Metallic contacts; Semiconductors; Specific contact resistance

Indexed keywords

ELECTRIC RESISTANCE; FILM GROWTH; NITRIDES; PHYSICAL VAPOR DEPOSITION; PLASMA APPLICATIONS; SCANDIUM COMPOUNDS; SEMICONDUCTING FILMS; SPUTTERING;

METALLIC CONTACTS; PLASMA ASSISTED PHYSICAL VAPOR DEPOSITION; SPECIFIC CONTACT RESISTANCE;

ELECTRIC CONTACTS;

EID: 18544410690     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(01)00102-7     Document Type: Article

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