Finite-capacity production planning algorithms for a semiconductor wafer fabrication facility

International Journal of Production Research

Volumn 39, Issue 5, 2001, Pages 825-842

  Horiguchi, K ^a   Raghavan, N ^b   Uzsoy, R ^b   Venkateswaran, S ^b  

^a HITACHI LTD   (Japan)

^b SCHOOL OF INDUSTRIAL ENGINEERING   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION; PERFORMANCE; PRODUCTION; SCHEDULING; SEMICONDUCTOR DEVICE MANUFACTURE;

FINITE-CAPACITY PRODUCTION PLANNING ALGORITHMS; SEMICONDUCTOR WAFER FABRICATION FACILITY;

PLANNING;

EID: 0035917226     PISSN: 00207543     EISSN: None     Source Type: Journal    
DOI: 10.1080/00207540010010253     Document Type: Article

References (28)

1. Bechte, W., 1988, Theory and practice of load-oriented manufacturing control. International Journal of Production Research, 26, 375-395.
2. Church, L. K., and Uzsoy, R., 1992, Analysis of periodic and event-driven rescheduling policies in dynamic shops. International Journal of Computer-Integrated Manufacturing, 5, 153-163.
3. Conway, R. W., Maxwell, W. L., and Miller, L. W., 1967, Theory of Scheduling (Reading, MA: Addison Wesley).
4. Fargher, H. E., and Smith, R. A., 1994, Planning in a flexible semiconductor manufacturing environment. In M. Zweben and M. Fox (eds), Intelligent Scheduling (San Francisco: Morgan Kaufman).
5. Glassey, C. R., and Resende, M., 1988, Closed-loop job release control for VLSI circuit manufacturing. IEEE Transactions on Semiconductor Manufacturing, 1, 36-46.
6. Goldratt, E., and Fox, R., 1986, The Race (Croton-on-the-Hudson: North River).
7. Hackman, S. T., and Leachman, R. C., 1989, A general framework for modeling production. Management Science, 35, 478-495.
8. Hadavi, K., Shahraray, M. S., and Voigt, K., 1989, ReDS: a dynamic planning, scheduling and control system for manufacturing. Journal of Manufacturing Systems, 9, 332-344.
9. Horiguchi, K., Uzsoy, R., and Venkateswaran, S., 1999, A fast approximation algorithm for cycle time estimation in wafer fabrication facilities. Proceedings of the 8th Industrial Engineering Research Conference, Phoenix, AZ, May.
10. Hung, Y.-F., and Leachman, R. C., 1996, A production planning methodology for semiconductor manufacturing based on iterative simulation and linear programming calculations. IEEE Transactions on Semiconductor Manufacturing, 9, 257-269.
11. Johnson, L. A., and Montgomery, D. C., 1974, Operations Research in Production Planning, Scheduling, and Inventory Control (New York: Wiley).
12. Kim, J., Leachman, R. C., and Suh, B., 1996, Dynamic release control policy for the semiconductor wafer fabrication lines. Journal of the Operational Research Society, 47, 1516-1525.
13. Leachman, R. C., Benson, R. F., Liu, C., and Raar, D. J., 1996, IMPReSS: an automated production planning and delivery quotation system at Harris Corporation - semiconductor sector. Interfaces, 26, 6-37.
14. Lu, S. C. H., Ramaswamy, D., and Kumar, P. R., 1994, Efficient scheduling policies to reduce mean and variance of cycle time in semiconductor manufacturing. IEEE Transactions on Semiconductor Manufacturing, 7, 374-388.
15. Mehta, S. V., and Uzsoy, R., 1998, Predictable scheduling of a job shop subject to breakdowns. IEEE Transactions on Robotics and Automation, 14, 365-378.
16. Mehta, S. V., and Uzsoy, R., 1999, Predictable scheduling of a single machine subject to breakdowns. International Journal of Computer-Integrated Manufacturing, 12, 15-38.
17. O'Donovan, R., McKay, K. N., and Uzsoy, R., 1999, Predictable scheduling on a single machine with machine breakdowns and sensitive jobs. International Journal of Production Research, 37, 4217-4233.
18. Pritsker, A. A. B., 1990, Papers, Experiences, Perspectives (Systems Publ.).
19. Pritsker, A. A. B., O'Reilly, J. J., and LaVal, D. K., 1997, Simulation with Visual SLAM and AweSim (New York: Wiley and Systems Publ.).
20. Pritsker, A. A. B., and Snyder, K., 1997, Production scheduling using FACTOR. In A. Artiba and S. E. Elmaghraby (eds), The Planning and Scheduling of Production Systems (London: Chapman & Hall).
21. Spearman, M. L., Woodruff, D., and Hopp, W., 1990, CONWIP: a pull alternative to KANBAN. International Journal of Production Research, 28, 879-894.
22. Tardif, V., and Spearman, M. L., 1997, Diagnostic scheduling in a finite-capacity environment. Computers and Industrial Engineering, 32, 867-878.
23. Uzsoy, R., Lee, C.-Y., and Martin-Vega, L. A., 1992, A review of production planning and scheduling models in the semiconductor industry. Part I: System characteristics, performance evaluation and production planning. IIE Transactions on Scheduling and Logistics, 24, 47-60.
24. Uzsoy, R., Lee, C.-Y., Martin-Vega, L. A., 1994, A review of production planning and scheduling models in the semiconductor industry. Part II: Shop floor control. IIE Transactions on Scheduling and Logistics, 26, 44-55.
25. Venkataraman, R., 1996, Frequency of replanning in a rolling horizon master production schedule for a process industry environment: a case study. Production and Operations Management, 5, 255-265.
26. Venkateswaran, S., 1999, Order prioritization and cycle time estimation in wafer fabrication facilities. Unpublished MSc thesis, Purdue University.
27. Vollmann, T. E., Berry, W. L., and Whybark, D. C., 1988, Manufacturing Planning and Control Systems, 2nd edn (Homewood, Ill: Richard D. Irwin).
28. Wein, L. M., 1988, Scheduling semiconductor wafer fabrication. IEEE Transactions on Semiconductor Manufacturing, 1, 115-130.