Segment-based approach for real-time reactive rescheduling for automatic manufacturing control

IEEE Transactions on Semiconductor Manufacturing

Volumn 13, Issue 3, 2000, Pages 264-272

  Toba, Hiroyasu ^a,b  

^a NEC CORPORATION   (Japan)

^b IEEE

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION; MACHINERY; PROCESS CONTROL; PRODUCTIVITY; SCHEDULING; SILICON WAFERS;

AUTOMATIC MANUFACTURING CONTROL; DISPATCHING; REACTIVE RESCHEDULING;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0034246784     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/66.857934     Document Type: Article

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