Spectroscopic ellipsometry study of buried graphitized layers in the ion-implanted diamond

Vacuum

Volumn 78, Issue 2-4, 2005, Pages 583-587

  Khomich, A V ^a   Kovalev, V I ^a   Zavedeev, E V ^b   Khmelnitskiy, R A ^c   Gippius, A A ^c  

^a INST OF RADIO ENG AND ELECTRONICS   (Russian Federation)

^b PROKHOROV GENERAL PHYSICS INSTITUTE   (Russian Federation)

^c LEBEDEV PHYSICAL INSTITUTE   (Russian Federation)

Author keywords

Annealing; Diamond; Graphitization; Ion implantation; Optical properties; Spectroscopic ellipsometry

Indexed keywords

ANNEALING; ATOMIC FORCE MICROSCOPY; ELLIPSOMETRY; GRAPHITIZATION; HIGH RESOLUTION ELECTRON MICROSCOPY; ION IMPLANTATION; OPTICAL PROPERTIES; RAMAN SPECTROSCOPY; TRANSMISSION ELECTRON MICROSCOPY;

BINARY POLARIZATION; ELECTRON ENERGY; LIGHT INTERFEROMETRY; SPECTROSCOPIC ELLIPSOMETRY;

DIAMONDS;

EID: 18444395563     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2005.01.090     Document Type: Conference Paper

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