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Diamond and Related Materials

Volumn 14, Issue 3-7, 2005, Pages 1067-1072

Etching of diamond-like carbon films deposited on polyethylene terephthalate

(4) Hirakuri, Kenji K a Kuwashima, Kiichiro a Tatsuta, Kazuya a Sato, Keisuke a

a TOKYO DENKI UNIVERSITY (Japan)

Author keywords

Chemical vapor deposition; Diamond like carbon; Etching; Microscopy

Indexed keywords

CARBON DIOXIDE; CHEMICAL VAPOR DEPOSITION; DEPOSITION; ETCHING; FREE RADICALS; MICROSCOPIC EXAMINATION; POLYETHYLENE TEREPHTHALATES; RAMAN SCATTERING; SURFACE PROPERTIES;

BIOMEDICAL MATERIALS; ELECTRICAL RESISTIVITY; OXYGEN RADICALS; PET BOTTLES;

DIAMOND LIKE CARBON FILMS;

EID: 18444386556 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/j.diamond.2004.12.032 Document Type: Conference Paper

Times cited : (5)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.