Application of DLC films as masks for integrated circuit fabrication

Diamond and Related Materials

Volumn 12, Issue 3-7, 2003, Pages 1013-1017

  Hirakuri, Kenji K ^a   Yoshimura, Masayuki ^a   Friedbacher, Gernot ^b  

^a TOKYO DENKI UNIVERSITY   (Japan)

^b VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

Diamond like carbon; Durability; IC fabrication process; XPS analysis

Indexed keywords

ATOMIC FORCE MICROSCOPY; AUGER ELECTRON SPECTROSCOPY; CRYSTAL ORIENTATION; DIFFUSION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; INTEGRATED CIRCUITS; MASKS;

IMPLANTED DOPANTS;

DIAMOND LIKE CARBON FILMS;

DIAMOND;

EID: 0037846243     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(02)00379-5     Document Type: Article

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