![]() |
Volumn 14, Issue 3-7, 2005, Pages 1023-1030
|
Carbon film deposition on polyethylene terephtalate by pulsed-plasma technology
|
Author keywords
Amorphous hydrogenated carbon; Defects; Diffusion; Mechanical properties
|
Indexed keywords
ATOMIC FORCE MICROSCOPY;
CARBON;
COMPOSITION;
DIFFUSION;
HYDROGENATION;
INDENTATION;
POLYETHYLENE TEREPHTHALATES;
SPUTTER DEPOSITION;
SUBSTRATES;
AMORPHOUS HYDROGENATED CARBON;
ATOMIC STRUCTURE;
PERMEATION PROPERTIES;
PULSED-PLASMA SPUTTERING;
AMORPHOUS FILMS;
|
EID: 18444382095
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/j.diamond.2004.10.042 Document Type: Conference Paper |
Times cited : (7)
|
References (18)
|