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Volumn 180-181, Issue , 2004, Pages 227-233
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Characterization by electron spin resonance of defects in a-C:H thin films. Correlation between structural evolutions and optical properties
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Author keywords
A C:H thin films; Disorder; Electron spin resonance; Optical properties; Structure
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Indexed keywords
ELECTRIC POTENTIAL;
INFRARED SPECTROSCOPY;
MIXTURES;
PARAMAGNETIC RESONANCE;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
RAMAN SPECTROSCOPY;
BIAS VOLTAGE;
GAS MIXTURES;
THIN FILMS;
COATING;
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EID: 1842815829
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2003.10.045 Document Type: Article |
Times cited : (4)
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References (27)
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