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Surface and Coatings Technology

Volumn 180-181, Issue , 2004, Pages 544-550

Hardness evaluation of W-Si-N sputtered coatings after thermal degradation

a UNIVERSITY OF COIMBRA (Portugal)

Author keywords

Hardness; Oxidation; Sputtering; W Si N

Indexed keywords

HARDNESS; HIGH TEMPERATURE APPLICATIONS; OXIDATION; PYROLYSIS; SPUTTERING; TERNARY SYSTEMS; TUNGSTEN ALLOYS;

HARDNESS EVALUATION; HIGH TEMPERATURE OXIDATION;

COATINGS;

HARDNESS;

EID: 1842765444 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2003.10.116 Document Type: Article

Times cited : (7)

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