SCOPUS 정보 검색 플랫폼

Key Engineering Materials

Volumn 230-232, Issue , 2002, Pages 640-643

Influence of heat treatment on the structure of W-Si-N sputtered films

(4) Ferreira, L a Louro, C a Cavaleiro, A a Trindade, B a

a UNIVERSITY OF COIMBRA (Portugal)

Author keywords

Silicon; Sputtering; Structural Evolution; Tungsten Nitride

Indexed keywords

AMORPHOUS MATERIALS; ANNEALING; COMPOSITION; CRYSTALLIZATION; HEAT TREATMENT; MAGNETRON SPUTTERING; SPUTTER DEPOSITION; STOICHIOMETRY; TUNGSTEN COMPOUNDS;

HARD COATINGS;

INORGANIC COATINGS;

EID: 0036435254 PISSN: 10139826 EISSN: 16629795 Source Type: Book Series
DOI: 10.4028/www.scientific.net/kem.230-232.640 Document Type: Conference Paper

Times cited : (5)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.