Optical 3D profilometer for in-process measurement of microsurface based on phase retrieval technique

Precision Engineering

Volumn 28, Issue 2, 2004, Pages 152-163

  Taguchi, Atsushi ^a   Miyoshi, Takashi ^a   Takaya, Yasuhiro ^a   Takahashi, Satoru ^a,b  

^a OSAKA UNIVERSITY   (Japan)

^b UNIVERSITY OF TOKYO   (Japan)

Author keywords

Diffraction intensity; In process measurement; Microsurface profile; Optical profiler; Phase retrieval; Scattering

Indexed keywords

ATOMIC FORCE MICROSCOPY; DIFFRACTION; LIGHT SCATTERING; MICROELECTROMECHANICAL DEVICES; OPTICAL ENGINEERING; PRECISION ENGINEERING; PROCESS ENGINEERING;

DIFFRACTION INTENSITY; IN-PROCESS MEASUREMENTS; MICROSURFACE PROFILE; OPTICAL PROFILERS; PHASE RETRIEVAL;

PROFILOMETRY;

EID: 1842421964     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2003.07.002     Document Type: Article

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