Instrument for on-line monitoring of surface roughness of machined surfaces

Optical Engineering

Volumn 39, Issue 12, 2000, Pages 3247-3254

  Valliant, J Glenn ^a   Foley, Michael P ^a   Bennett, Jean M ^b  

^a Optical Dimensions   (United States)

^b 1275 Sage Court ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LASERS; LIGHT SCATTERING; ONLINE SYSTEMS;

MACHINED SURFACES; PROFILOMETRY;

SURFACE ROUGHNESS;

EID: 0034427693     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1318786     Document Type: Article

References (8)

1. E. L. Church, H. A. Jenkinson, and J. M. Zavada, "Measurement of the finish of diamond turned metal surfaces by differential light scattering," Opt. Eng. 16, 360-374 (1977).
2. E. L. Church and J. M. Zavada, "Residual surface roughness of diamond-turned optics," Appl. Opt. 14, 1788-1795 (1975).
3. E. L. Church, H. A. Jenkinson, and J. M. Zavada, "Relationship between surface scattering and microtopographic features," Opt. Eng. 18, 125-136 (1979).
4. J. C. Stover, Optical Scattering: Measurement and Analysis, SPIE, Bellingham, WA (1995).
5. J. M. Bennett and L. Mattsson, Introduction to Surface Roughness and Scattering, 2nd ed., Optical Society of America, Washington (1999), and references therein.
6. J. M. Bennett and J. H. Dancy, "Stylus profiling instrument for measuring statistical properties of smooth optical surfaces," Appl. Opt. 20, 1785-1802 (1981).
7. J. M. Bennett, "Measurement of the rms roughness, autocovariance function, and other statistical properties of optical surfaces using a FECO scanning interferometer," Appl. Opt. 15, 2705-2721 (1976).
8. J. G. Valliant, "Detection of roll surface roughness defects caused by the grinder," presented at 38th Mechanical Working and Steel Processing Conference, October 13-16, 1996, Cleveland, OH, Iron & Steel Society.