Micromachined Profile Measurement by Means of Optical Inverse Scattering Phase Method

CIRP Annals - Manufacturing Technology

Volumn 45, Issue 1, 1996, Pages 497-500

  Miyoshi, Takashi ^a   Takaya, Yasuhiro ^a   Saito, Katsumasa ^b  

^a OSAKA UNIVERSITY   (Japan)

^b Gumma Polytechnic College   (Japan)

Author keywords

Micro profile; Optical measurement; Ultra precision

Indexed keywords

COMPUTER SIMULATION; LIGHT SCATTERING; OPTICAL INSTRUMENTS; SURFACE MEASUREMENT; TURNING;

MICROMACHINED SURFACE PROFILE; OPTICAL INVERSE SCATTERING PHASE METHOD; ULTRAPRECISION MACHINING;

MICROMACHINING;

EID: 0029694452     PISSN: 00078506     EISSN: 17260604     Source Type: Journal    
DOI: 10.1016/S0007-8506(07)63110-2     Document Type: Article

References (5)

1. Measurements of Roughness of very Smooth Surfaces
2. Comparison between Stylus and Optical Methods for Measuring Surfaces
3. The phase problem
4. Phase retrieval using two intensity measurements in the complex plane
5. Phase retrieval using the logarithmic Hilbert transform and the Fourier-series expansion