Transfer of a thin silicon film on to a ceramic substrate

Thin Solid Films

Volumn 403-404, Issue , 2002, Pages 34-38

  Solanki, C S ^a   Bilyalov, R R ^a   Poortmans, J ^a   Nijs, J ^a,b  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

Ceramic substrate; Layer transfer; Porous silicon; Thin film

Indexed keywords

ANNEALING; CERAMIC MATERIALS; CRYSTALLINE MATERIALS; ETCHING; PHOTOVOLTAIC EFFECTS; POROSITY; POROUS SILICON; SUBSTRATES;

SILICON FILMS;

THIN FILMS;

EID: 18244429967     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(01)01554-1     Document Type: Conference Paper

References (12)