Formation of a bonded SOI interface using a spin-on dielectric

IEEE International SOI Conference

Volumn , Issue , 1996, Pages 44-45

  Cole, Robert C ^a   Robertson, Ruby E ^a   Garrett, Robert M ^a   Mayer, Donald C ^a  

^a AEROSPACE CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTAL DEFECTS; DIELECTRIC MATERIALS; GLASS BONDING; INFRARED IMAGING; INTERFACES (MATERIALS); OXIDATION; OXIDES; SEMICONDUCTING SILICON; SILICON WAFERS; THERMAL EFFECTS;

GLASS REFLOW; PLANARITY; SPIN ON DIELECTRIC; WAFER BONDING;

SILICON ON INSULATOR TECHNOLOGY;

EID: 0030380305     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)