From monosilane to crystalline silicon. Part III. Characterization of amorphous, hydrogen-containing silicon products

Journal of Non-Crystalline Solids

Volumn 351, Issue 14-15, 2005, Pages 1317-1327

  Odden, Jan Ove ^a   Egeberg, Per Kristian ^a   Kjekshus, Arne ^b  

^a UNIVERSITY OF AGDER   (Norway)

^b UNIVERSITY OF OSLO   (Norway)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; AMORPHOUS MATERIALS; CHEMICAL VAPOR DEPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROGEN; NUCLEAR MAGNETIC RESONANCE SPECTROSCOPY; PYROLYSIS;

CLUSTERED POLYHYRIDES; CRYSTALLINE SILICON; HYDROGEN-CONTAINING SILICON PRODUCTS; MONOSILANE;

SILICON;

EID: 18244395311     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2004.11.024     Document Type: Article

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