Ion beam modification of ZnO thin films on MgO

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 206, Issue , 2003, Pages 282-286

  Matsunami, N ^a   Itoh, M ^a   Takai, Y ^a   Tazawa, M ^b   Sataka, M ^c  

^a NAGOYA UNIVERSITY   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^c JAPAN ATOMIC ENERGY AGENCY   (Japan)

Author keywords

Grain growth; Ion irradiation; Optical and electric properties; ZnO film

Indexed keywords

GRAIN SIZE AND SHAPE; ION BEAMS; MAGNESIA; ZINC OXIDE;

ION IRRADIATION;

THIN FILMS;

EID: 0038823539     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(03)00745-6     Document Type: Conference Paper

References (8)

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