Crystallization of isolated amorphous zones in semiconductors

Philosophical Magazine

Volumn 83, Issue 22, 2003, Pages 2557-2571

  Jencic I ^a   Hollar, E P ^b   Robertson, I M ^b  

^a JO EF STEFAN INSTITUTE   (Slovenia)

^b University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; ANNEALING; CHEMICAL BONDS; CRYSTAL ORIENTATION; CRYSTALLIZATION; TRANSMISSION ELECTRON MICROSCOPY;

AMORPHOUS ZONES;

SEMICONDUCTOR MATERIALS;

EID: 17644440159     PISSN: 14786435     EISSN: None     Source Type: Journal    
DOI: 10.1080/1478643031000119976     Document Type: Article

References (37)

1. ALLEN, C. W., FUNK, L. L., and RYAN, E. A., 1997, Microstructure evolution during irradiation, Ion-Solid Interactions for Materials Modification and Processing (Pittsburgh, Pennsylvania: Materials Research Society), p. 277.
2. ALLEN, W., and RYAN, E. A., 1998a, Microsc. Res. and Technique, 42, 255; 1998b, http://www.anl.gov.
3. ALLEN, W., and RYAN, E. A., 1998a, Microsc. Res. and Technique, 42, 255; 1998b, http://www.anl.gov.
4. BENCH, M. W., 1992, PhD Thesis, Department of Materials Science and Engineering, Urbana, Illinois, University of Illinois, USA.
5. BENCH, M. W., ROBERTSON, I. M., and KIRK, M. A., 1991, Nucl. Instrum. Meth. B, 59-60, 372.
6. BENCH, M. W., ROBERTSON, I. M., KIRK, M. A., and JENCIC, I., 2000, J. appl. Phys., 87, 49.
7. BENCH, M. W., TAPPIN, D. K., and ROBERTSON, I. M., 1992, Phil. Mag. Lett., 66, 39.
8. BERNSTEIN, N., AZIZ, M. J., and KAXIRAS, E., 2000, Phys. Rev. B, 61, 6696.
9. CATURLA, M. J., DE LA RUBIA, T. D., and GILMER, G. H., 1995, J. appl. Phys., 77, 3121.
10. CATURLA, M. J., DE LA RUBIA, T. D., MARQUES, L. A., and GILMER, G. H., 1996, Phys. Rev. B, 54, 16 683.
11. CSEPREGI, L., KENNEDY, E. F., MAYER, J. W., and SIGMON, T. W., 1978, J. appl. Phys., 49, 3906.
12. DASH, W. C., and NEWMAN, R., 1955, Phys. Rev. B, 99, 1151.
13. FERLA, A. L., CANNAVO, S., FERLA, G., CAMPISANO, S. U., RIMINI, E., and SERVIDORI, M., 1987, Nucl. Instrum. Meth. B, 19-20, 470.
14. FRANTZ, J., TARUS, J., NORDLUND, K., and KEINONEN, J., 2001, Phys. Rev. B, 64, 125 313.
15. HEERA, V., HENKEL, T., KOGLER, R., and SKORUPA, W., 1995, Phys. Rev. B, 52, 15 776.
16. JACKSON, K. A., 1988, J. Mater. Res., 3, 1218.
17. JENCIC, I., BENCH, M. W., ROBERTSON, I. M., and KIRK, M. A., 1995, J. appl. Phys., 78, 974.
18. JENCIC, I., and ROBERTSON, I. M., 1996, J. Mater. Res., 11, 2152.
19. LANDOLT-BÖRNSTEIN, L., 1983, Numerical Data and Functional Relationships in Science and Technology, Vol. 17A, edited by O. Madelung, M. Schulz and H. Weiss (New York: Springer), p. 496.
20. LINNROS, J., HOLMEN, G., and SVENSSON, B., 1985, Phys. Rev. B, 32, 2770.
21. LULLI, G., and MERLI, P. G., 1993, Phys. Rev. B, 47, 14 023.
22. LULLI, G., MERLI, P. G., and ANTISARI, M. V., 1987, Phys. Rev. B, 36, 8038.
23. NAKATA, J., 1991, Phys. Rev. B, 43, 14 643.
24. OLSON, G. L., and ROTH, J. A., 1988, Mater. Sci. Rep., 3, 3.
25. PRIOLO, F., and RIMINI, E., 1990, Mater. Sci. Rep., 5, 319.
26. PRIOLO, F., SPINELLA, C., FERLA, A. L., RIMINI, E., and FERLA, G., 1989, Appl. Surf. Sci., 43, 178.
27. PRIOLO, F., SPINELLA, C., and RIMINI, E., 1990, Phys. Rev. B, 41, 5235.
28. SKVARC, J., 1993, International Conference on Microelectronic Devices and Materials, 23, 201.
29. SKVARC, J., ILIC, R., and KODRE, A., 1992, Nucl. Instrum. Meth. B, 71, 60.
30. SPAEPEN, F., 1978, Acta metall., 26, 1167.
31. SPAEPEN, F., and TURNBULL, D., 1982, Laser Annealing of Semiconductors, edited by J. M. Poate and J. W. Mayer (New York: Academic Press), chapter 2.
32. SUNI, I., GOLTZ, G., NICOLET, M. A., and LAU, S. S., 1982, Thin Solid Films, 93, 171.
33. WILLIAMS, J. S., 1998, Mater. Sci. Engng., 253, 8.
34. WILLIAMS, J. S., and ELLIMAN, R. G., 1981, Nucl. Instrum. Meth. B, 182, 389; 1983, Phys. Rev. Lett., 51, 1069.
35. WILLIAMS, J. S., and ELLIMAN, R. G., 1981, Nucl. Instrum. Meth. B, 182, 389; 1983, Phys. Rev. Lett., 51, 1069.
36. WILLIAMS, J. S., ELLIMAN, R. G., BROWN, W. L., and SEIDEL, T. E., 1985, Phys. Rev. Lett., 55, 1482.
37. ZIEGLER, J. F., BIERSACK, J. P., and LITTMARK, U. (editors), 1985, The Stopping and Range of Ions in Solids, edited by J. F. Ziegler (Oxford: Pergamon), p. 109.