Processing considerations with plasma-based ion implantation of polymers: Theoretical aspects, limitations, and experimental results

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 208, Issue 1-4, 2003, Pages 260-266

  Lacoste, A ^a   Pelletier, J ^a  

^a CNRS   (France)

Author keywords

Dielectric materials; Plasma based ion implantation; Polymers; Surface modification

Indexed keywords

ION IMPLANTATION; PLASMA APPLICATIONS; PLASMA DENSITY; SURFACE TREATMENT;

PULSE DURATION;

POLYMERS;

EID: 0037810935     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(03)00646-3     Document Type: Conference Paper

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