Nanoelectronics based on carbon nanotubes: Technological challenges and recent developments

Fullerenes Nanotubes and Carbon Nanostructures

Volumn 13, Issue SUPPL. 1, 2005, Pages 255-258

  Liebau, M ^a   Graham, A P ^a   Duesberge, G S ^a   Unger, E ^a   Seidel, R ^a  

^a INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

Carbon nanotube vias; Carbon nanotubes; Interconnects; Silicon technology

Indexed keywords

ACETYLENE; CHEMICAL VAPOR DEPOSITION; ELECTRIC RESISTANCE; LITHOGRAPHY; MICROPROCESSOR CHIPS; NANOSTRUCTURED MATERIALS; PLASMA ETCHING; SILICON;

CARBON NANOTUBE VIAS; INTERCONNECTS; NANOELECTRONICS; SILICON TECHNOLOGY;

CARBON NANOTUBES;

EID: 17644414488     PISSN: 1536383X     EISSN: None     Source Type: Journal    
DOI: 10.1081/FST-200039292     Document Type: Conference Paper

References (8)

1. Glasow et al. Proceedings of the Advanced Metallization Conference, San Diego, 2000.
2. Steinhögl, W., Schindler, G., Steinlesberger, G., and Engelhardt, M. (2002) Size-dependent resistivity of metallic wires in the mesoscopic range. Phys. Rev. B, 66: 075414.
3. http://public.itrs.net/.
4. Wei, B.Q., Vajtai, R., and Ajayan, P.M. (2001) Reliability and current carrying capacity of carbon nanotubes. Appl. Phys. Lett., 79: 1172-1174.
5. Frank, S., Poncharal, P., Wang, Z.L., and deHeer, W.A. (1998) Carbon nanotube quantum resistors. Science, 280: 1744-1746.
6. Javey, A., Guo, J., Wang, Q., Lundstrom, M., and Dai, H. (2003) Ballistic carbon nanotube field-effect transistors. Nature, 424: 654-657.
7. Liebau. Proceeedings of the IWEPNM, Kirchberg, Austria, 2004 to be published.
8. Collins, P.G., Arnold, M.S., and Avouris, Ph. (2001) Engineering nanotubes and nanotube circuits using electrical breakdown. Science, 292: 706-709.