Size effect on heat transfer in micro gas sensors

Sensors and Actuators, A: Physical

Volumn 120, Issue 2, 2005, Pages 397-402

  Han, M H ^a   Liang, Xin Gang ^a   Tang, Z A ^b  

^a TSINGHUA UNIVERSITY   (China)

^b DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Gas sensor; Microscale; Minimization; Thermal radiation

Indexed keywords

COMPUTATIONAL METHODS; ENERGY UTILIZATION; HEAT RADIATION; HEAT TRANSFER; OPTIMIZATION; RADIATION EFFECTS; THERMAL CONDUCTIVITY OF GASES; THERMAL INSULATION;

GAP DISTANCE; MICRO HOTPLATE (MHP); MICROSCALE; SURFACE TEMPERATURES;

CHEMICAL SENSORS;

EID: 17644406356     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.12.031     Document Type: Article

References (16)

1. J.S. Suehle, R.E. Cavicchi, and M. Gaitan Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processing IEEE Electron. Device Lett. 14 3 1993 118 120
2. S.K.H. Fung, P.C.H. Chan, and J.K.O. Sin Proceedings of the IEEE Electron Device and Materials Symposium Tech. Digest, Taiwan Micro-hotplate for thin film gas sensor: Fabrication using CMOS technology 1994 pp. 6-1-1-6-1-4
3. T.M. Berlicki Thermal vacuum sensor with compensation of heat transfer Sens. Actuators A 93 2001 27 32
4. J. Melendez, A.J. De Castro, and F. Lopez Spectrally selective gas cell for electrooptical infrared compact multigas sensor Sens. Actuators A 47 1995 417 421
5. H. Arwin Is ellipsometry suitable for sensor applications? Sens. Actuators A 92 2001 43 51
6. P. Wang, and L.P. Kong The design of a new integrated gas sensor array based on FEA Sens. Actuators B 66 2000 66 69
7. Y.W. Mo, Y. Okawa, and K. Inoue Low-voltage and low-power optimization of micro-heater and its on-chip drive circuitry for gas sensor array Sens. Actuators A 100 2002 94 101
8. Z.A. Tang, S.K.H. Fung, and D.T.W. Wong An integrated gas sensor based on tin oxide thin-film and improved micro-hotplate Sens. Actuators B 46 1998 174 179
9. J.P. Li, X.G. Gao, and M.H. Zhu Thermal analysis and structural design of membrane-type micro gas sensor Chin. J. Sens. Actuators 3 2000 193 198
10. F.M. Devienne Low density heat transfer J.P. Hartnett T.F. Irvine Jr. Advances in Heat Transfer vol. 2 1965 Academic Press New York 271 356
11. M. Born, E. Wolf, Principles of Optics, Pergamon Press, New York, p. 64.
12. G.A. Domoto, R.F. Boehm, and C.L. Tien Experimental investigation of radiative transfer between metallic surfaces at cryogenic temperatures J. Heat Transfer 92 1970 412 417
13. C.M. Hargreaves Anomalous radiative transfer between closely-spaced bodies Phys. Lett. 30A 1969 491 492
14. J.B. Xu, K. Lauger, and R. Moller Heat transfer between metallic surfaces at small distances J. Appl. Phys. 76 1994 7209 7216
15. M.D. Whale, and E.G. Cravalho Analysis of the enhancement of thermal radiation between closely-spaced surfaces due to microscale phenomena HTD, vol.345, National Heat Transfer Conference ASME 7 1997 41 50
16. R.H. Zhang, Y.Q. Gu, and D.Z. Zhu Thermal measurement and analysis of micro hotplate array using thermography Sens. Actuators A 100 2002 144 152