Alignment and fixing of fiber optics based on electrothermal MEMS actuators

IEEE Photonics Technology Letters

Volumn 17, Issue 4, 2005, Pages 816-818

  Unamuno, A ^a   Yao, J ^a   Uttamchandani, D ^a  

^a UNIVERSITY OF STRATHCLYDE   (United Kingdom)

Author keywords

Microactuator; Microelectromechanical systems (MEMS); Microelectromechanical systems (MEMS) assembly; Microelectromechanical systems (MEMS) packaging; Microoptoelectromechanical systems

Indexed keywords

CURING; ELECTRONICS PACKAGING; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; OPTICAL FIBER FABRICATION; SILICON ON INSULATOR TECHNOLOGY; SINGLE MODE FIBERS;

MICROELECTROMECHANICAL SYSTEMS (MEMS) ASSEMBLY; MICROELECTROMECHANICAL SYSTEMS (MEMS) PACKAGING; MICROOPTOELECTROMECHANICAL SYSTEMS; ULTRAVIOLET CURING;

FIBER OPTICS;

EID: 17644381592     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2005.844006     Document Type: Article

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