Metal plasma source for PBII using arc-like discharge with hot cathode

Surface and Coatings Technology

Volumn 186, Issue 1-2 SPEC. ISS., 2004, Pages 157-160

  Chayahara, A ^a   Mokuno, Y ^a   Kinomura, A ^a   Tsubouchi, N ^a   Heck, C ^a   Horino, Y ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Metal plasma; Plasma based ion implantation; Vacuum arc discharge

Indexed keywords

LIQUID METALS; MAGNETIC FILTERS; PLASMA APPLICATIONS; PLASMA SOURCES; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SUBSTRATES; TITANIUM;

ARC LIKE DISCHARGES; DOSE DISTRIBUTION; METAL PLASMA SOURCES; PLASMA BASED ION IMPLANTATION (PBII);

ION IMPLANTATION;

PLASMA TREATMENT;

EID: 17644369645     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2004.04.013     Document Type: Article

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