Characterization of arclike Ti vapor plasma on the high-voltage electron-beam evaporator

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 5, 1997, Pages 2728-2739

  Kajioka, H ^a  

^a Western Hiroshima Prefecture Industrial Research Institute   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODES; ELECTRON BEAMS; ELECTRON EMISSION; EMISSION SPECTROSCOPY; EVAPORATORS; IONIZATION; TITANIUM; VAPORIZATION; VAPORS;

ELECTRON BEAM EVAPORATOR; MELTED EVAPORATOR;

PLASMAS;

EID: 0031223729     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580947     Document Type: Article

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