Structural modifications in He-implanted waveguide layers of LiNbO3

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 120, Issue 1-4, 1996, Pages 84-87

  Avrahami, Y ^a   Zolotoyabko, E ^a  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ELECTRON DENSITY MEASUREMENT; OPTICAL MATERIALS; OPTICAL WAVEGUIDES; OPTOELECTRONIC DEVICES; X RAY DIFFRACTION ANALYSIS;

OPTOELECTRONIC MATERIALS;

ION IMPLANTATION;

EID: 0030566515     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)00484-3     Document Type: Article

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