Adhesion, oxidation and wear properties of compositionally gradient (Ti1-xAlx)N coatings made by plasma enhanced chemical vapour deposition

Journal of Materials Science Letters

Volumn 16, Issue 19, 1997, Pages 1597-1599

  Kim, Byoung June ^a   Lee, Sang Hyeob ^b   Lee, Jung Joong ^a  

^a Seoul National University   (South Korea)

^b Hynix Semiconductor Inc   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ALUMINUM; AUGER ELECTRON SPECTROSCOPY; CHEMICAL VAPOR DEPOSITION; COATINGS; HARDNESS; OXIDATION RESISTANCE; PLASMA APPLICATIONS; THERMAL EFFECTS; THERMOGRAVIMETRIC ANALYSIS; TRANSMISSION ELECTRON MICROSCOPY; WEAR RESISTANCE;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION (PECVD); TITANIUM ALUMINUM NITRIDE;

TITANIUM NITRIDE;

EID: 0031257966     PISSN: 02618028     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1018528704190     Document Type: Article

References (6)

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