Influences of ion energy on morphology and preferred orientation of chromium thin films prepared by ion beam and vapor deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 4, 1998, Pages 2489-2494

  Kuratani, Naoto ^a   Ebe, Akinori ^a   Ogata, Kiyoshi ^a  

^a NISSIN ELECTRIC CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032355966     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581370     Document Type: Article

References (13)

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