VUV reflectance measurements and optical constants of SiC thin films

Journal of Electron Spectroscopy and Related Phenomena

Volumn 144-147, Issue , 2005, Pages 987-992

  Nicolosi, P ^a   Garoli, D ^a   Pelizzo, M G ^a   Rigato, V ^b   Patelli, A ^a,b   Rigato, F ^b  

^a UNIVERSITY OF PADOVA   (Italy)

^b LABORATORI NAZIONALI DI LEGNARO   (Italy)

Author keywords

Optical coatings; Optical constants; SiC; VUV

Indexed keywords

CHEMICAL VAPOR DEPOSITION; LIGHT ABSORPTION; MAGNETRON SPUTTERING; OPTICAL COATINGS; PARAMETER ESTIMATION; SURFACE ROUGHNESS; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

MULTILAYER COATINGS; OPTICAL CONSTANTS; REFLECTANCE MEASUREMENTS; VACUUM ULTRA-VIOLET (VUV);

SILICON CARBIDE;

EID: 17444398230     PISSN: 03682048     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.elspec.2005.01.248     Document Type: Conference Paper

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