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Volumn 80, Issue 8, 2005, Pages 1617-1623

Theoretical search for atomic-like states of silicon at the surface of thermally grown SiO2 films on silicon surfaces

Author keywords

[No Author keywords available]

Indexed keywords

MATHEMATICAL MODELS; MOLECULAR STRUCTURE; OXIDATION; PROBABILITY DENSITY FUNCTION; SILICA; THERMAL EFFECTS; THIN FILMS;

ATOMIC-LIKE STATES; SILICON SURFACES; STERIC CONSTRAINTS; THERMAL OXIDATION;

SEMICONDUCTING SILICON;

EID: 17444385297 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/s00339-004-3142-8 Document Type: Article

Times cited : (3)

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