Development and test of a new grating-polarimeter and its application in ellipsometric measurements

Thin Solid Films

Volumn 455-456, Issue , 2004, Pages 138-142

  Masetti, E ^a   Krasilnikova, A ^b  

^a ENEA   (Italy)

^b SAPIENZA UNIVERSITY OF ROME   (Italy)

Author keywords

Ellipsometry

Indexed keywords

ELLIPSOMETRY; MODULATORS; OSCILLATIONS; PHOTOELASTICITY; PHOTOMULTIPLIERS; POLARIMETERS; REAL TIME SYSTEMS; SILICON;

ADC CHANNELS; AUTOCOLLIMATION; BLAZED DIFFRACTION GRATINGS; SILICON DETECTORS;

DIFFRACTION GRATINGS;

EID: 17144468503     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.01.001     Document Type: Conference Paper

References (16)

1. Azzam R.M.A. Opt. Lett. 10:1985;309.
2. Azzam R.M.A. Rev. Sci. Instrum. 56:1985;1746.
3. Azzam R.M.A. Opt. Lett. 12:1987;555.
4. Jellison G.E. Jr. Opt. Lett. 12:1987;766.
5. Brudzewski K. J. Mod. Opt. 38:1991;889.
6. Krishnan S. J. Opt. Soc. Am. A. 9:1992;1615.
7. Masetti E., de Silva M.P. Thin Solid Films. 246:1994;47.
8. Azzam R.M.A. Appl. Opt. 31:1992;3574.
9. Azzam R.M.A., Giardina K.A. J. Opt. Soc. Am. A. 10:1993;1190.
10. Todorov T., Nikolova L. Opt. Lett. 17:1992;358.
11. Masetti E., Krasilnikova A. SPIE. 3738:1999;166.
12. Brudzewski K. J. Mod. Opt. 18:1991;889.
13. Compain E., Drevillon B. Rev. Sci. Instrum. 68:1997;2671.
14. Azzam R.M.A., Lopez A.G. J. Opt. Soc. Am. A. 6:1989;1513.
15. Krishnan S. J. Opt. Soc. Am. A. 9:1992;1615.
16. Masetti E., Montecchi M., Larciprete R., Cozzi S. Appl. Opt. 35:1996;5626.