In situ monitoring of film deposition with an ellipsometer based on a four-detector photopolarimeter

Applied Optics

Volumn 35, Issue 28, 1996, Pages 5626-5629

  Masetti, E ^a   Montecchi, M ^a   Larciprete, R ^a,b   Cozzi, S ^a,b  

^a Ente Nazionale Energie Alternative   (Italy)

^b INN FIS Frascati   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0004059426     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.35.005626     Document Type: Article

References (17)

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