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Volumn 3738, Issue , 1999, Pages 166-172
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New grating photopolarimeter for the ellipsometric characterization of thin films
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Author keywords
[No Author keywords available]
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Indexed keywords
COMPUTER SIMULATION;
DIFFRACTION GRATINGS;
ELLIPSOMETRY;
FILM GROWTH;
HELIUM NEON LASERS;
POLARIMETERS;
REFRACTIVE INDEX;
THIN FILMS;
FOUR-DETECTOR PHOTOPOLARIMETERS;
OPTICAL FILMS;
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EID: 0032685606
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Article |
Times cited : (1)
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References (14)
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