SCOPUS 정보 검색 플랫폼

Materials Research Society Symposium - Proceedings

Volumn 541, Issue , 1999, Pages 375-380

Low temperature MOCVD of thin film PZT

(2) Chen, Ing Shin a Roeder, Jeffery F a

a Advanced Technology Materials Inc (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; COMPOSITION; ELECTROCHEMICAL ELECTRODES; EVAPORATION; FERROELECTRIC MATERIALS; FILM PREPARATION; INDIUM; METALLORGANIC CHEMICAL VAPOR DEPOSITION; POLARIZATION; THERMAL EFFECTS; THIN FILMS;

ELECTRON BEAM EVAPORATION; FERROELECTRIC THIN FILMS; PEROVSKITE FILMS; REMANENT POLARIZATION;

LEAD COMPOUNDS;

EID: 0032592316 PISSN: 02729172 EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Article

Times cited : (9)

References (7)

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2
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- Bai, G.-R.¹ Wang, A.² Tsu, I.-F.³ Foster, C.M.⁴ Auciello, O.⁵

3
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- (1993) Integ. Ferroelectrics , vol.3 , pp. 131
- De Keijser, M.¹ Dormans, G.J.M.² Van Veldhoven, P.J.³ Larsen, P.K.⁴

4
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- Roeder, J.F.¹ Vaartstra, B.A.² Van Buskirk, P.C.³ Beratan, H.R.⁴

5
- 0032316432
- P.C. van Buskirk, J.F. Roeder, T.H. Baum, S.M. Bilodeau, M.W. Russel, S.T. Johnston, R.J. Carl, D.J. Desrochers, B.C. Hendrix, and F. Hintermaier, Integ. Ferroelectrics 21, 273 (1998).
- (1998) Integ. Ferroelectrics , vol.21 , pp. 273
- Van Buskirk, P.C.¹ Roeder, J.F.² Baum, T.H.³ Bilodeau, S.M.⁴ Russel, M.W.⁵ Johnston, S.T.⁶ Carl, R.J.⁷ Desrochers, D.J.⁸ Hendrix, B.C.⁹ Hintermaier, F.¹⁰

6
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- to be published in proceedings
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- (1998) th ISAF
- Roeder, J.F.¹ Chen, I.-S.² Van Buskirk, P.C.³ Beratan, H.R.⁴ Hanson, C.M.⁵

7
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- T. Hase, T. Sakuma, K. Amanuma, T. Mori, A. Ochi, and Y. Miyasaka, Integ. Ferroelectrics 8, p. 89(1995).
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.