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Volumn 290-293, Issue , 2001, Pages 131-134
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Non-destructive structural analysis of surface blistering by TEM and EELS in a reflection configuration
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Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHOUS SILICON;
DEUTERIUM;
ELECTRON DIFFRACTION;
ELECTRON ENERGY LOSS SPECTROSCOPY;
ELECTRON MICROSCOPY;
HELIUM;
ION BOMBARDMENT;
ION IMPLANTATION;
NANOSTRUCTURED MATERIALS;
NONDESTRUCTIVE EXAMINATION;
SURFACE BLISTERING;
PLASMAS;
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EID: 0035278391
PISSN: 00223115
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-3115(00)00556-0 Document Type: Article |
Times cited : (22)
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References (6)
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