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Volumn 158-159, Issue , 2002, Pages 395-398
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High-fluence implantation of iron into polyimide
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Author keywords
Ion implantation; Iron; Polyimide; Rutherford backscattering spectroscopy
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Indexed keywords
DIFFUSION;
PROTONS;
RUTHERFORD BACKSCATTERING SPECTROSCOPY;
TRANSMISSION ELECTRON MICROSCOPY;
ION CURRENT DENSITY;
POLYIMIDES;
ION IMPLANTATION;
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EID: 17144445786
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(02)00255-4 Document Type: Article |
Times cited : (3)
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References (16)
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