Metallic nanoparticles formed in polyimide by ion implantation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 175-177, Issue , 2001, Pages 548-553

  Kobayashi, Tomohiro ^a   Iwata, Tadahisa ^a   Doi, Yoshiharu ^a   Iwaki, Masaya ^a  

^a INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

Author keywords

Carbonization; High dose implantation; Metallic nanoparticles; Polyimide

Indexed keywords

CARBONIZATION; ION IMPLANTATION; METALLIC FILMS; PLASTIC FILMS; SURFACE TREATMENT;

METALLIC NANOPARTICLES; POLYIMIDES;

NANOSTRUCTURED MATERIALS;

EID: 0035302575     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(01)00342-1     Document Type: Conference Paper

References (11)