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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 175-177, Issue , 2001, Pages 437-441

Degradation of polyimide by 100 keV He+, Ne+, Ar+ and Kr+ ions

(7) Hnatowicz, V a Perina V a Mackova A a Svorcik V b Rybka, V b Fink, D c Heitz, J d

a NUCLEAR PHYSICS INSTITUTE (Czech Republic)

b INSTITUTE OF CHEMICAL TECHNOLOGY (Czech Republic)

c HAHN MEITNER INSTITUT (Germany)

d JOHANNES KEPLER UNIVERSITY LINZ (Austria)

Author keywords

Electrical resistance; ERDA; Ion implantation; Polymers; RBS

Indexed keywords

ARGON; DEGRADATION; ELECTRIC RESISTANCE MEASUREMENT; HELIUM; KRYPTON; NEON; POLYIMIDES; POSITIVE IONS; RADIATION EFFECTS; RUTHERFORD BACKSCATTERING SPECTROSCOPY;

VOLATILE DEGRADATION PRODUCTS;

ION BOMBARDMENT;

EID: 0035301870 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(00)00557-7 Document Type: Conference Paper

Times cited : (11)

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