A differential charge-transfer readout circuit for multiple output capacitive sensors

Sensors and Actuators, A: Physical

Volumn 119, Issue 2, 2005, Pages 309-315

  Rödjegard, Henrik ^a   Lööf, Anders ^a  

^a Imego AB The Institute of Micro and Nanotechnology   (Sweden)

Author keywords

Charge transfer; Multiple output capacitive sensors; Readout circuit

Indexed keywords

ACCELEROMETERS; CAPACITORS; CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; GYROSCOPES; MICROMACHINING; PROXIMITY SENSORS; SINGLE CRYSTALS;

MULTIPLE OUTPUT CAPACITIVE SENSORS; NOISE SIMULATION; PRESSURE SENSORS; READOUT CIRCUIT;

CHARGE TRANSFER;

EID: 17144431839     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.10.003     Document Type: Article

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