SCOPUS 정보 검색 플랫폼

Volumn 80, Issue 2, 2005, Pages 201-206

Microstructure and ferroelectric properties of r.f. magnetron sputtering derived PZT thin films deposited on interlayer (PbO/TiO2)

(3) Park, Chul Ho a Son, Young Gook a Won, Mi Sook a

a Pusan National University (South Korea)

Author keywords

Ferroelectric properties; Ferroelectric random access memory; Interlayer; PZT thin film

Indexed keywords

LEAD OXIDE; LEAD TITANATE ZIRCONATE; PLATINUM; SILICON; SILICON DIOXIDE; TITANIUM; TITANIUM DIOXIDE; UNCLASSIFIED DRUG; ZIRCONIUM DERIVATIVE;

CHEMISTRY; CONFERENCE PAPER; CRYSTALLIZATION; ELECTRIC ACTIVITY; ELECTRODE; FILM; HIGH TEMPERATURE; MICROWAVE OVEN; MICROWAVE RADIATION; PROCESS DEVELOPMENT; RADIOFREQUENCY RADIATION; STRUCTURE ANALYSIS; SURFACE PROPERTY; TEMPERATURE DEPENDENCE; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 17144418897 PISSN: 0026265X EISSN: None Source Type: Journal
DOI: 10.1016/j.microc.2004.07.012 Document Type: Conference Paper

Times cited : (13)

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