Development and analysis of the vertical capacitive accelerometer

Sensors and Actuators, A: Physical

Volumn 119, Issue 1, 2005, Pages 8-18

  Lee, Innam ^a   Yoon, Gil Ho ^a   Park, Jungyul ^a   Seok, Seonho ^a   Chun, Kukjin ^a   Lee, Kyo Il ^a  

^a Seoul National University   (South Korea)

Author keywords

Accelerometer; Etching hole; MEMS; Multiphysics; Undercut

Indexed keywords

CAPACITANCE; ELECTRIC FIELD EFFECTS; ELECTROSTATICS; ETCHING; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OPTIMIZATION; SENSORS;

ELECTRICAL FORCES; ETCHING HOLE; MULTIPHYSICS; UNDERCUT;

ACCELEROMETERS;

EID: 17144402939     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.06.033     Document Type: Article

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