Single crystal SiC microhotplate conductometric chemical sensor arrays

Proceedings - Electrochemical Society

Volumn 8, Issue , 2004, Pages 36-42

  Mlcak, Richard ^a   Doppalapudi, Dharanipal ^a   Whitfield, George ^a   Tuller, Harry ^a  

^a Boston MicroSystems Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DEGRADATION; OXIDES; PRESSURE EFFECTS; SEMICONDUCTOR MATERIALS; SILICON CARBIDE; SINGLE CRYSTALS; THERMAL STRESS; THIN FILMS;

METAL TRACES; MICROHOTPLATE ARRAYS; REDUCING ENVIRONMENT; SEMICONDUCTING METAL OXIDES (SMO);

CHEMICAL SENSORS;

EID: 17044435079     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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