Thermal stability of SrRuO3 bottom electrode and electric property of Pb(Zr, Ti)O3 thin film deposited on SrRuO3

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 11 B, 2002, Pages 6873-6876

  Takahashi, Kenji ^a   Oikawa, Takahiro ^a   Saito, Keisuke ^b   Fujisawa, Hironori ^c   Shimizu, Masaru ^c   Funakubo, Hiroshi ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b PHILIPS RESEARCH LABORATORIES   (Germany)

^c UNIVERSITY OF HYOGO   (Japan)

Author keywords

MOCVD; PZT; Residual strain; Sputtering; SrRuO3

Indexed keywords

CRYSTAL STRUCTURE; ELECTRIC PROPERTIES; ELECTRODES; METALLORGANIC CHEMICAL VAPOR DEPOSITION; SPUTTERING; THERMODYNAMIC STABILITY;

PZT; RESIDUAL STRAIN; SRRUO3;

THIN FILMS;

EID: 17044423596     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.41.6873     Document Type: Article

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