High temperature nitrogen plasma immersion ion implantation into molybdenum

Surface and Coatings Technology

Volumn 180-181, Issue , 2004, Pages 362-366

  Mandl S ^a   Manova, D ^a   Gerlach, J W ^a   Assmann, W ^b   Neumann, H ^a   Rauschenbach, B ^a  

^a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

^b Maier Leibnitz Laboratorium   (Germany)

Author keywords

ERDA; Molybdenum; Nitriding; PIII; X ray diffraction

Indexed keywords

DIFFUSION; HIGH TEMPERATURE EFFECTS; MOLYBDENUM; PHASE TRANSITIONS; PLASMA APPLICATIONS; SPUTTERING; X RAY DIFFRACTION ANALYSIS;

PLASMA IMMERSION ION IMPLANTATION;

ION IMPLANTATION;

NITRIDE;

EID: 16744368603     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2003.10.134     Document Type: Article

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